Van Den Heuvel, DieterDieterVan Den HeuvelSantoro, GaetanoGaetanoSantoroGronheid, RoelRoelGronheidBraggin, JenniferJenniferBragginRosslee, CraigCraigRossleeLeray, PhilippePhilippeLerayCheng, ShauneeShauneeChengSchreutelkamp, RobRobSchreutelkampHillel, NoamNoamHillel2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16367Characterizing immersion lithography micro bridge defects using advanced features of teh SEMVision G3 STAR FIBProceedings paper