Zhang, Quan-ZiQuan-ZiZhangTinck, StefanStefanTinckde Marneffe, Jean-FrancoisJean-Francoisde MarneffeZhang, LipingLipingZhangBogaerts, AnnemieAnnemieBogaerts2021-10-242021-10-2420170003-6951https://imec-publications.be/handle/20.500.12860/30022Mechanisms for plasma cryogenic etching of porous materialsJournal articlehttp://aip.scitation.org/doi/abs/10.1063/1.4999439