A platform for backside illuminated CMOS image sensors for UV and isible applications

Vereecke, BartBartVereeckeCavaco, CelsoCelsoCavacoDe Munck, KoenKoenDe MunckHaspeslagh, LucLucHaspeslaghMinoglou, KikiKikiMinoglouSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanTack, KlaasKlaasTackOsman, HarisHarisOsman2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24766A platform for backside illuminated CMOS image sensors for UV and isible applicationsProceedings paperhttps://confit.atlas.jp/guide/event-img/ssdm2014/M-9-2/public/pdf_archive?type=in