Experimental evidence toward understanding charge pumping signals in 3-D devices with Poly-Si channel

Tang, BaojunBaojunTangZhang, WeidongWeidongZhangToledano Luque, MariaMariaToledano LuqueZhang, JianfuJianfuZhangDegraeve, RobinRobinDegraeveJi, ZhigangZhigangJiArreghini, AntonioAntonioArreghiniVan den Bosch, GeertGeertVan den BoschVan Houdt, JanJanVan Houdt2021-10-222021-10-2220140018-9383https://imec-publications.be/handle/20.500.12860/24597Experimental evidence toward understanding charge pumping signals in 3-D devices with Poly-Si channelJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6782311