Metal in-diffusion during Fe and Co-germanidation of germanium

Simoen, EddyEddySimoenOpsomer, KarlKarlOpsomerClaeys, CorCorClaeysMaex, KarenKarenMaexDetavernier, C.C.DetavernierVan Meirhaeghe, R.L.R.L.Van MeirhaegheClauws, P.P.Clauws2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14476Metal in-diffusion during Fe and Co-germanidation of germaniumProceedings paper