Verdonck, PatrickPatrickVerdonckVan Besien, ElsElsVan BesienTrompoukis, ChristosChristosTrompoukisVanstreels, KrisKrisVanstreelsUrbanowicz, AdamAdamUrbanowiczDe Roest, DavidDavidDe RoestBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18262Influence of the UV Cure on advanced PECVD low-k materialsMeeting abstract