Neuber, ChristianChristianNeuberCooke, MikeMikeCookeDespont, MichelMichelDespontDurig, UrsUrsDurigKastner, MarkusMarkusKastnerKnoll, ArminArminKnollde Marneffe, Jean-FrancoisJean-Francoisde MarneffeRangelow, IvoIvoRangelowRawlings, ColinColinRawlingsDe Schepper, PeterPeterDe SchepperSchmidt, Hans-WernerHans-WernerSchmidtStrohriegl, PeterPeterStrohriegl2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22851Molecular glass resists for all-dry high-resolution scanning probe lithographyOral presentationhttp://www.mne2013.org/technical-program/