Reversing Hydrogen-Related Loss in Î±-Ta Thin Films for Quantum Device Fabrication

Lozano, D. P.D. P.LozanoMongillo, MassimoMassimoMongilloRaes, BartBartRaesCanvel, YannYannCanvelMassar, ShanaShanaMassarVadiraj, A. M.A. M.VadirajIvanov, TsvetanTsvetanIvanovAcharya, RohithRohithAcharyaVan Damme, JacquesJacquesVan DammeVan de Vondel, JorisJorisVan de VondelWan, DannyDannyWanPotocnik, AntonAntonPotocnikDe Greve, K.K.De Greve2025-08-182025-08-182025-AUG 1WOS:001546649100001https://imec-publications.be/handle/20.500.12860/46090Reversing Hydrogen-Related Loss in Î±-Ta Thin Films for Quantum Device FabricationJournal article10.1002/advs.202509244WOS:001546649100001MEDLINE:40787841