Varela Pedreira, OlallaOlallaVarela PedreiraStucchi, MicheleMicheleStucchiGupta, AnshulAnshulGuptaVega Gonzalez, VictorVictorVega Gonzalezvan der Veen, MarleenMarleenvan der VeenLariviere, StephaneStephaneLariviereWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokeiCroes, KristofKristofCroes2021-11-222021-11-022021-11-2220201541-7026WOS:000612717200091https://imec-publications.be/handle/20.500.12860/38211Metal reliability mechanisms in Ruthenium interconnectsProceedings paper978-1-7281-3199-3WOS:000612717200091