Laser ablation of SIO2/SINX and ALOX/SINX backside passivation stacks for advanced cell architectures

Jaffrennou, PérinePérineJaffrennouUruena De Castro, AngelAngelUruena De CastroDas, JoJoDasPenaud, JulienJulienPenaudMoors, MathieuMathieuMoorsRothschild, AudeAudeRothschildLombardet, BenoitBenoitLombardetSzlufcik, JozefJozefSzlufcik2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19115Laser ablation of SIO2/SINX and ALOX/SINX backside passivation stacks for advanced cell architecturesProceedings paper