Hens, S.S.HensVan Landuyt, J.J.Van LanduytBender, HugoHugoBenderLanckmans, FilipFilipLanckmansMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4423EFTEM analysis of the interaction of CO with a fluorinated organic dielectricProceedings paper