Pollentier, IvanIvanPollentierVanpaemel, JohannesJohannesVanpaemelZahedmanesh, HoumanHoumanZahedmaneshAdelmann, ChristophChristophAdelmannHuyghebaert, CedricCedricHuyghebaertGallagher, EmilyEmilyGallagherBrose, SashaSashaBroseDanylyuk, SerhijSerhijDanylyukBergmann, KlausKlausBergmann2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25768Optical testing of EUV pellicle materialsOral presentationhttp://euvlsymposium.lbl.gov/pdf/2015/Posters/P-MP-06_Pollentier.pdf