Eyben, PierrePierreEybenMody, JayJayModyNazir, AftabAftabNazirSchulze, AndreasAndreasSchulzeClarysse, TrudoTrudoClarysseHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22328Sub-nanometer characterization of nanoelectronic devicesBook chapterhttp://www.crcpress.com/product/isbn/9781466505094