Electron mean-free path for CNT in vertical interconnects approaches Cu

van der Veen, MarleenMarleenvan der VeenBarbarin, YohanYohanBarbarinKashiwagi, YusakuYusakuKashiwagiTokei, ZsoltZsoltTokei2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24683Electron mean-free path for CNT in vertical interconnects approaches CuProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6831865&queryText%3DElectron+mean-free+path+for+CNT+in+vertical+i