Wang, BoBoWangDe Coster, JeroenJeroenDe CosterWevers, MartineMartineWeversDe Wolf, IngridIngridDe Wolf2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24803Gas leak rate study of MEMS thin film package in different environmentsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6962722&contentType=Conference+Publications