Pawlak, BartekBartekPawlakSurdeanu, RaduRaduSurdeanuColombeau, B.B.ColombeauSmith, A.J.A.J.SmithCowern, N.E.B.N.E.B.CowernLindsay, RichardRichardLindsayVandervorst, WilfriedWilfriedVandervorstBrijs, BertBertBrijsRichard, OlivierOlivierRichardCristiano, F.F.Cristiano2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9411Evidence on the mechanism of boron deactivation in Ge-preamorphized ultrashallow junctionsJournal article