Quantitative carrier profiling of silicon devices by nano-srp

De Wolf, PeterPeterDe WolfClarysse, TrudoTrudoClarysseCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstSnauwaerts, JanJanSnauwaertsHellemans, L.L.Hellemans2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1178Quantitative carrier profiling of silicon devices by nano-srpOral presentation