Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical Results

Tonova, DianaDianaTonovaDepas, MichelMichelDepasLibezny, MilanMilanLibeznyHeyns, MarcMarcHeynsVanhellemont, JanJanVanhellemont2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/912Single Wavelength and Spectroscopic Ellipsometry Characterization of Ultra-Thin Gate Oxides on Silicon and Comparison with Electrical ResultsOral presentation