Metal Etch Depth Metrology using YieldStar and CDSEM

Anunciado, RoyRoyAnunciadoAliaj, IlirjanIlirjanAliajvan Haren, RichardRichardvan HarenTruffert, VincentVincentTruffertMoussa, AlainAlainMoussaGoossens, DannyDannyGoossensTamaddon, Amir-HosseinAmir-HosseinTamaddon2025-06-052024-07-312025-06-052024979-8-3503-8456-71078-8743WOS:001245033700070https://imec-publications.be/handle/20.500.12860/44234Metal Etch Depth Metrology using YieldStar and CDSEMProceedings paper10.1109/ASMC61125.2024.10545490979-8-3503-8455-0WOS:001245033700070