Wu, AiwenAiwenWuBayana, HareenHareenBayanaFoubert, PhilippePhilippeFoubertChacko, AndreaAndreaChackoGuerrero, DouglasDouglasGuerrero2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/36341Improving EUV underlayer coating defectivity using point-of-use filtrationProceedings paperhttps://doi.org/10.1117/12.2551647