Low-k films modification under EUV and VUV radiation

Rakhimova, T.T.RakhimovaRakhimov, A.A.RakhimovMankelevich, Y.A.Y.A.MankelevichLopaev, D.V.D.V.LopaevKovalev, A.S.A.S.KovalevVasil'eva, A.N.A.N.Vasil'evaZyryanov, S.M.S.M.ZyryanovKurchikov, K.K.KurchikovProshina, O.O.ProshinaVoloshin, D.G.D.G.VoloshinNovikova, N.N.N.N.NovikovaKrishtab, MikhailMikhailKrishtabBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220140022-3727https://imec-publications.be/handle/20.500.12860/24416Low-k films modification under EUV and VUV radiationJournal articlehttp://iopscience.iop.org/0022-3727/47/2/025102/pdf/0022-3727_47_2_025102.pdf