Integration of a recessed SiGe Source/Drain into a PMOS transistor

Washington, LoriLoriWashingtonNouri, FaranFaranNouriVerheyen, PeterPeterVerheyenDe Wolf, IngridIngridDe WolfMoroz, VictorVictorMorozKawaguchi, MarkMarkKawaguchiYihwan, KimKimYihwanSamoilov, ArkadiiArkadiiSamoilovJurczak, GosiaGosiaJurczak2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11544Integration of a recessed SiGe Source/Drain into a PMOS transistorProceedings paper