Vos, I.I.VosMeuris, MarcMarcMeurisSijmus, BramBramSijmusStella, MarioMarioStellaDelaney, N.N.DelaneyGobbin, KorneelKorneelGobbin2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5820Copper CMP using a Lam teres linear planarization technologyOral presentation