Mertens, PaulPaulMertensDe Gendt, StefanStefanDe GendtDepas, MichelMichelDepasKenis, KarineKarineKenisOpdebeeck, AnnAnnOpdebeeckSnee, PeterPeterSneeGräf, D.D.GräfBrown, G.G.BrownHeyns, MarcMarcHeyns2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1347Effect of Fe contamination on quality of poly silicon gate structuresProceedings paper