Rudra, SukumarSukumarRudraRoels, JorisJorisRoelsBryce, GeorgeGeorgeBryceHaspeslagh, LucLucHaspeslaghWitvrouw, AnnAnnWitvrouwBaets, RoelRoelBaetsVan Thourhout, DriesDriesVan Thourhout2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16142SiGe-based Grating Light Valve: A leap towards monolithic integration of MOEMSMeeting abstract