Ong, PatrickPatrickOngPeddeti, ShivajiShivajiPeddetiLeunissen, PeterPeterLeunissenBabu, S. V.S. V.Babu2021-10-192021-10-1920111099-0062https://imec-publications.be/handle/20.500.12860/19511Chemical mechanical polishing of Ge using colloidal silica particles and H2O2Journal articlehttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=ESLEF600001400000700H254000001&idtype=cvips&gifs=yes