Halder, SandipSandipHalderLeray, PhilippePhilippeLerayDi Lorenzo, PaoloPaoloDi LorenzoWang, FeiFeiWangZhang, PengchengPengchengZhangFang, WeiWeiFangLiu, KevinKevinLiuJau, JackJackJau2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26687Study of design-based e-beam defect inspection for hotspot detection and process window characterization on 10nm logic deviceProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2502474