Impact of high-energy particle irradiation on polycrystalline silicon films

Nakabayashi, M.M.NakabayashiOhyama, HidenoriHidenoriOhyamaSimoen, EddyEddySimoenClaeys, C.C.ClaeysTanaka, K.K.TanakaKobayashi, K.K.KobayashiMiyahara, K.K.Miyahara2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5506Impact of high-energy particle irradiation on polycrystalline silicon filmsProceedings paper