Litovchenko, V. G.V. G.LitovchenkoRomanyuk, B. N.B. N.RomanyukEfremov, A. A.A. A.EfremovMel'nik, V. P.V. P.Mel'nikClaeys, CorCorClaeys2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2001Stimulated buried dielectric phase formation for nanelectronic aimsProceedings paper