Acidic cleaning solutions for post InGaAs CMP cleaning

Park, Jin-GooJin-GooParkPurushothaman, MuthukrishnanMuthukrishnanPurushothamanLee, Jung-HwanJung-HwanLeeChoi, In-chanIn-chanChoiKim, Hyun-TaeHyun-TaeKimTeugels, LieveLieveTeugelsKim, Tae-GonTae-GonKim2021-10-262021-10-262018-04https://imec-publications.be/handle/20.500.12860/31489Acidic cleaning solutions for post InGaAs CMP cleaningProceedings paper