Sputtered tantalum as a structural materials for surface micromachined RF switches

Sedky, SherifSherifSedkyFiorini, PaoloPaoloFioriniWitvrouw, AnnAnnWitvrouwBaert, KrisKrisBaert2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6816Sputtered tantalum as a structural materials for surface micromachined RF switchesProceedings paper