A model for the radiation degradation of polycrystalline silicon films

Ohyama, H.H.OhyamaNakabayashi, M.M.NakabayashiTakakura, K.K.TakakuraSimoen, EddyEddySimoenTakami, Y.Y.TakamiClaeys, CorCorClaeys2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6660A model for the radiation degradation of polycrystalline silicon filmsOral presentation