Bergonzo, P.Foord, J.Garrido, J.A.Gheeraert, E.Haenen, KenJackman, R.B.Kalish, R.eKoizumi, S.Mainwood, A.Milne, W.I.Nebel, C.Nesladek, MilosRistein, J.Vanecek, M.2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/9990Proceedings of the 10th International Workshop on Surface and Bulk Defects in CVD Diamond Films - SBDD XBook