Detavernier, C.C.DetavernierDe Gryse, R.R.De GryseVan Meirhaeghe, R. L.R. L.Van MeirhaegheCardon, F.F.CardonRu, Guo-PingGuo-PingRuQu, Xin-PingXin-PingQuLi, Bing-ZongBing-ZongLiAlves Donaton, RicardoRicardoAlves DonatonMaex, KarenKarenMaex2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4334Nondestructive characterization of thin silicides using x-ray reflectivityJournal article