Tao, ZhengZhengTaoVos, IngridIngridVosAltamirano Sanchez, EfrainEfrainAltamirano SanchezXu, KaidongKaidongXuHellin, DavidDavidHellinCamerotto, ElisabethElisabethCamerottoJumel, HeleneHeleneJumelTitus, MonicaMonicaTitus2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24600N10 SADP bulk FinFET depth micro loading improvement with bias pulsing plasmaMeeting abstract