Analysis of short channel MOSFET behavior after gate oxide breakdown and its impact on digital circuit reliability

Groeseneken, GuidoGuidoGroesenekenKaczer, BenBenKaczerDegraeve, RobinRobinDegraeve2021-10-152021-10-152003-04https://imec-publications.be/handle/20.500.12860/7634Analysis of short channel MOSFET behavior after gate oxide breakdown and its impact on digital circuit reliabilityProceedings paper