An O2+ probe energy study for boron quantification in Si1 xGex (0 <= x <= 1) using secondary ion mass spectrometry

Morris, RichardRichardMorris2021-10-232021-10-2320160169-4332https://imec-publications.be/handle/20.500.12860/27041An O2+ probe energy study for boron quantification in Si1 xGex (0 <= x <= 1) using secondary ion mass spectrometryJournal articlehttp://www.sciencedirect.com/science/article/pii/S0169433216317421