Atomic layer deposition of high-k dielectric layers on single-walled carbon nanotubes

Cott, DaireDaireCottLiyanage, LuckshithaLuckshithaLiyanageDelabie, AnneliesAnneliesDelabieAdelmann, ChristophChristophAdelmannVan Elshocht, SvenSvenVan ElshochtWong, Hon- Sum PhilipHon- Sum PhilipWong2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20502Atomic layer deposition of high-k dielectric layers on single-walled carbon nanotubesMeeting abstract