De Simone, DaniloDaniloDe SimoneVanelderen, PieterPieterVanelderenVandenberghe, GeertGeertVandenberghe2021-10-242021-10-2420170914-9244https://imec-publications.be/handle/20.500.12860/28159Photo material readiness at the eve of EUVL HVMJournal articlehttps://www.jstage.jst.go.jp/article/photopolymer/30/5/30_613/_article