de Marneffe, Jean-FrancoisJean-Francoisde MarneffeRezvanov, AskarAskarRezvanovChanson, RomainRomainChansonBabaei Gavan, KhashayarKhashayarBabaei GavanFujikawa, M.M.FujikawaYamaguchi, T.T.YamaguchiNozawa, S.S.NozawaKikuchi, Y.Y.KikuchiMaekawa, K.K.Maekawa2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32806A Novel Volatile Film for Dielectric Plasma Damage ProtectionMeeting abstracthttp://pesm2019.insight-outside.fr/