Carrier profile determination in device structures using AFM-based methods

Vandervorst, WilfriedDe Wolf, PeterClarysse, TrudoTrenkler, ThomasHellemans, L.Snauwaerts, JanRaineri, Vito2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1687Carrier profile determination in device structures using AFM-based methodsBook chapter