Ocket, IljaIljaOcketTilmans, HarrieHarrieTilmansDancila, DragosDragosDancilaDe Raedt, WalterWalterDe RaedtNauwelaers, BartBartNauwelaersHuynen, IsabelleIsabelleHuynen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17721Micromachined cavity resonator on MCM-D with shielded coplanar waveguide feed for automotive radar applicationsProceedings paper