Sacrificial self-assembled monolayers for the passivation of GaAs (100) surfaces and interfaces

Cuypers, DanielDanielCuypersFleischmann, ClaudiaClaudiaFleischmannvan Dorp, DennisDennisvan DorpBrizzi, SimoneSimoneBrizziTallarida, MassimoMassimoTallaridaMüller, MatthiasMatthiasMüllerHönicke, PhilippPhilippHönickeBillen, ArneArneBillenChintala, Ravi ChandraRavi ChandraChintalaConard, ThierryThierryConardSchmeisser, DieterDieterSchmeisserVandervorst, WilfriedWilfriedVandervorstVan Elshocht, SvenSvenVan ElshochtArmini, SilviaSilviaArminiDe Gendt, StefanStefanDe GendtAdelmann, ChristophChristophAdelmann2021-10-232021-10-2320160897-4756https://imec-publications.be/handle/20.500.12860/26487Sacrificial self-assembled monolayers for the passivation of GaAs (100) surfaces and interfacesJournal articledx.doi.org/10.1021/acs.chemmater.6b01732