Atom-probe for arsenic implant doped FinFET characterization

Kambham, Ajay KumarAjay KumarKambhamKumar, ArulArulKumarGilbert, MatthieuMatthieuGilbertVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20898Atom-probe for arsenic implant doped FinFET characterizationOral presentation