Adelmann, ChristophChristophAdelmannKesters, JurgenJurgenKestersOpsomer, KarlKarlOpsomerDetavernier, C.C.DetavernierKittl, JorgeJorgeKittlVan Elshocht, SvenSvenVan Elshocht2021-10-172021-10-1720090003-6951https://imec-publications.be/handle/20.500.12860/14867Interdiffusion and crystallization in HfO2/Al2O3 superlatticesJournal article