Impact of single charged gate oxide defects on the performance and scaling of nanoscaled FETs

Franco, JacopoJacopoFrancoKaczer, BenBenKaczerToledano Luque, MariaMariaToledano LuqueRoussel, PhilippePhilippeRousselMitard, JeromeJeromeMitardRagnarsson, Lars-AkeLars-AkeRagnarssonWitters, LiesbethLiesbethWittersChiarella, ThomasThomasChiarellaTogo, MitsuhiroMitsuhiroTogoHoriguchi, NaotoNaotoHoriguchiGroeseneken, GuidoGuidoGroesenekenBukhori, M.F.M.F.BukhoriGrasser, T.T.GrasserAsenov, A.A.Asenov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20692Impact of single charged gate oxide defects on the performance and scaling of nanoscaled FETsProceedings paper