A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonators

Stoffels, SteveSteveStoffelsBryce, GeorgeGeorgeBryceVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisMertens, RobertRobertMertensPuers, BobBobPuersTilmans, HarrieHarrieTilmansWitvrouw, AnnAnnWitvrouw2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14518A novel gap narrowing process for creating high aspect ratio transduction gaps for MEM HF resonatorsOral presentation