Towards atomic-layer-scale processing of high mobility channel materials in acidic solutions for N5 and N7 technology nodes

van Dorp, DennisDennisvan DorpArnauts, SophiaSophiaArnautsAbrenica, GranielGranielAbrenicaHolsteyns, FrankFrankHolsteyns2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27452Towards atomic-layer-scale processing of high mobility channel materials in acidic solutions for N5 and N7 technology nodesProceedings paper