Rothschild, AudeAudeRothschildToman, JanosJanosTomanPenaud, JulienJulienPenaudJaffrennou, PérinePérineJaffrennouChoulat, PatrickPatrickChoulatCornagliotti, EmanueleEmanueleCornagliottiRecaman Payo, MariaMariaRecaman PayoPawlak, BartekBartekPawlakDas, JoJoDasUruena De Castro, AngelAngelUruena De CastroSingh, SukhvinderSukhvinderSinghHorzel, JörgJörgHorzel2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21428Impact of surface preparation prior to ALD-Al2O3 deposition for PERC type solar cellProceedings paper