Implant-free SiGe qqantum well pFET: A novel, highly scalable and low thermal budget device, featuring raised source/drain and high-mobility channel.

Hellings, GeertGeertHellingsWitters, LiesbethLiesbethWittersKrom, RaymondRaymondKromMitard, JeromeJeromeMitardHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooSchulze, AndreasAndreasSchulzeEneman, GeertGeertEnemanKerner, ChristophChristophKernerFranco, JacopoJacopoFrancoChiarella, ThomasThomasChiarellaTakeoka, ShinjiShinjiTakeokaTseng, JoshuaJoshuaTsengWang, Wei-EWei-EWangVandervorst, WilfriedWilfriedVandervorstAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHeyns, MarcMarcHeynsDe Meyer, KristinKristinDe MeyerMeuris, MarcMarcMeurisHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17246Implant-free SiGe qqantum well pFET: A novel, highly scalable and low thermal budget device, featuring raised source/drain and high-mobility channel.Proceedings paper